Infopaket

Optical metrology and standardization

ОК 25.

Обов’язкова дисципліна для ОП

First

2021/2022

6 Semester

3

- Know and understand the basic concepts of metrology - Understand the broad interdisciplinary context of the specialty - Be able to choose a standardized method of evaluation and measurement control of product properties and process parameters - Be able to use principles and methods of reproduction of reference quantities in building reference measuring instruments , technical control and testing - Be able to establish a rational nomenclature of metrological characteristics of measuring instruments to obtain measurement results with specified accuracy - Know the standards of metrology, measuring instruments and metrological product quality assurance - Know and understand the subject area, its history - Have a terminological base, understand the scientific and technical documentation of the state metrological system of Ukraine, international recommendations and guidelines for the specialty.

Full-time form

1. Know the basic principles of verification, calibration and metrological certification of measuring instruments; of calculation of optical systems and laws of physical optics concerning the phenomena of interference, diffraction, coherence of light at image formation in devices of optotechnics 2. Be able to propose optical schemes for experimental laser equipment with the calculation of the accuracy of reproduction of length standards in a wide range of its values ​​and metrological support for precise measurements of film nanosystem thicknesses by photoelectric ellipsometry and laser interferometry 3. Have the skills of optical and physical measurements with a given accuracy, the implementation of precision angular, azimuthal and spectral ellipsometric measurements for the calculation in the nanometer range of thicknesses and optical stable semiconductor heterostructures and thin films with metal beads and plates for photovoltaic

"Optical metrology and standardization" includes the study of sections: metrology - the science of measurement, principles of development and construction of optical measuring instruments, spectroscopic prerequisites for precision measurement of small lengths and sizes of nanoobjects, methods of engineering calculation of optical measuring instruments and quality control of nanomaterials. measurements, basic principles of spectrometers construction, metrological support of optical polarization measurements in the mode of their automation by means of computer-integrated systems.

Основна: 1. П.І. Неєжмаков. Міжнародна система одиниць. За матеріалами доповіді 2018 року в КНУТШ 3. Прикладна оптична спектроскопія/ В.І. Григорук, П.А. Коротков. К.: ВПЦ «Київський університет», 2016. – 574 с. 4. Лазерна спектроскопія: навч пос. / В.І. Григорук, П.А. Коротков. – К.: ВПЦ «Київський університет. 2017. - 263 с. Додаткова: 1. Кованжі П.О., Прокопець В.М., Поперенко Л.В., Бондаренко В.А. АВТОМАТИЗОВАНИЙ СПЕКТРОЕЛІПСОМЕТРИЧНИЙ КОМПЛЕКС ДЛЯ ЗАСТОСУВАННЯ В ОПТИЧНІЙ МЕТРОЛОГІЇ НАНООБ`ЄКТІВ. Матеріали 12-ї ВНПКМУС «Технічне регулювання, метрологія , якість, інформаційні та транспортні технології», 2021, О. С. 89-93. 2. Handbook of Optical Dimensional Metrology, edited by Kevin Harding. CRC Press. London, New York. 2013, 480 p. 3. Rajpal S. Sirohi. Introduction to Optical Metrology. CRC Press. London, New York. 2016, 408 p.

Teaching methods: lectures, laboratory work, modular tests, exam.

Semester assessment: 1. Modular test 1: 5 points, 2. Modular test 2: 5 points, 3. Laboratory work (6 works): - 5 points for each. Final assessment in the form of an exam: - 60 points.

Ukrainian