Infopaket

Modern technologies and materials of MEMS devices

ДВС.1.02.02

Вибіркова дисципліна для ОП

Second

2023/2024

3 Semester

4

The ability to build adequate models of chemical phenomena, to study them for obtaining new conclusions and deepening of understanding of nature, including using methods molecular, mathematical and computer modeling. Ability to organize, plan and implement a chemical experiment. The ability to interpret, objectively evaluate and present the results of one's work research. The ability to formulate new hypotheses and scientific problems in the field of chemistry, to choose directions and appropriate methods for their solution based on an understanding of modern issues research in the field of chemistry and taking into account the available resources. The ability to choose optimal research methods and techniques. Possession of the general methodology of carrying out scientific research.

Full-time form

The educational discipline "Modern MEMS technologies and materials" is based on a cycle disciplines of professional and practical training, in particular such as "Mechanics", "Electricity and magnetism", "Optics", "Atomic and nuclear physics", "Solid-state micro- and nanotechnology, degradation and reliability of materials and structures based on them", "Nanophotonics", "Selected sections of inorganic and organic chemistry", "Electrophysical, chemical and biological methods of research".

The discipline program presents the basic principles of microelectromechanical creation devices, functional composition and structural and technological solutions of MEMS - devices, the classification of technological processes used in them is given production, features of nano-range structures, the principle of electromechanical analogies, scaling effects, as well as quantum mechanical effects operating in the 1-100 nm range, scientific and analytical devices for research of nanostructures, methods of pattern formation and structures of devices, principles used in the assembly of nanostructures, the main ones groups of materials used in MEMS, as well as problems and features of application MEMS for biotechnology.

1. Micromachining Techniques for Fabrication of Micro and Nano Structures, ed. Mojtaba Kahrizi, InTech, 2012 2. Micromachining of Engineering materials, Ed. Joseph McGeough, Marcel Dekker Inc New York, 2002 3. Handbook of Silicon Based MEMS Materials and Technologies, eds.Veikko Lindroos, Markku Tilli , Ari Lehto and Teruaki Motooka, Oxford , Elsevier, 2010 4. Lyshevski, Sergey Edward, MEMS and NEMS : systems, devices, and structures, CRC Press LLC, N.W., 2002 5. N Mark J. Schulz, Vesselin N. Shanov, Yeoheung Yun - Nanomedicine Design of Particles, Sensors, Motors, Implants, Robots, and Devices (Artech House Series Engineering in Medicine & Biology) (2009) .W., 2002, 6. Vikas Choudhary ed., MEMS fundamental technology and applications, CRC Press Taylor & Francis Group 2013.

lectures, laboratory

- semester assessment: 1. Modular control work: RN 1.1-1.3, 4.1 - 46 points/29 points. 2. Independent semester work: RN 2.1-2.2, 3.1. – 38 points/23 points. 3. Laboratory work: RN 1.4,3.1 – 16 points/8 points. Total: 100 points/60 points. - final assessment: absent.

Ukrainian